ATMI: Gas Source Recognized in Safety Standard; National Fire Protection Association Passes Vote For Sub-Atmospheric Standard
DANBURY, Conn. & SAN JOSE, Calif.--(BUSINESS WIRE)--Jan. 9, 2001--ATMI, Inc. (Nasdaq: ATMI) and Matheson TriGas (a wholly-owned subsidiary of Nippon Sanso) today announced that the National Fire Protection Association, NFPA, recently passed NFPA 318, Standard for Protection of Cleanrooms, which specifies sub-atmospheric gas delivery systems as preferred for use with toxic or flammable gas sources in semiconductor fabrication facilities.
The Standard, (section 318-34 (6-6.2) (Log #6)), was voted on at the May 2000 meeting of the NFPA, and is now in effect. In part, the proposal states:
"Sub-atmospheric flammable dopant gas sources shall be used instead of high pressure cylinder flammable gas sources whenever process compatibility will allow."
ATMI and Matheson TriGas provide products that offer the sub-atmospheric gas storage and delivery recommended in the NFPA Standard for ion implant applications, marketed under, and widely known as, the SDS(r) Gas Source product.
The NFPA 318 committee included an appendix to the citing, describing the application of the sub-atmospheric technology:
"Appendix to Draft National Fire Protection Association Proposal 318
A-6-6.2 Traditionally, high pressure cylinders have been used to contain flammable dopant gases such as arsine and phosphine used, for example, in chemical vapor deposition and ion implantation operations. In ion implanters, it is common to have small dopant gas cylinders in a gas cabinet located within the implanter enclosure. A recent innovative dopant source that is an alternative to the high-pressure gas cylinder is called the sub-atmospheric dopant gas source. This gas source looks like a high-pressure cylinder except that it is filled with a microporous material which adsorbs the dopant gas. During normal operation, the gas cylinder pressure is reduced and the gas is withdrawn.
Under leak scenarios, the gas release from these new sub-atmospheric systems is decreased by a factor of 30 to 60 thousand as compared to a high-pressure cylinder source. These systems offer a considerable reduction in fire hazard. There are also process advantages since the gas in the new system is a 100 percent concentration rather than at 10 to 15 percent concentration typical in high-pressure systems because of safety reasons. In addition, the systems are located at or within the ion implanter or the CVD tool, eliminating long runs of costly co-axial tubing from the gas vault."
NFPA is a worldwide leader in providing fire, electrical, and life safety to the public. Established in 1896, the mission of the international, nonprofit, membership organization is to reduce the worldwide burden of fire and other hazards on the quality of life by developing and advocating scientifically-based consensus codes and standards, research, training, and education. More information is available through the Internet at nfpa.org.
ATMI provides specialty materials, and related equipment systems and services for the worldwide semiconductor industry. Related equipment includes delivery, treatment, monitoring, and analytical process monitoring systems. Services include material management, equipment servicing, and thin film wafer deposition.
Matheson TriGas is a single source provider of specialty gases, bulk gases, gas handling equipment, purification systems, and support services to semiconductor manufacturers worldwide. |
