ATMI And SC Fluids in Joint Development Agreement To Develop Novel, Enabling Semiconductor Wafer Cleaning Systems
BUSINESS WIRE - February 13, 2001 12:08
DANBURY, Conn., Feb 13, 2001 (BUSINESS WIRE) -- ATMI, Inc. (Nasdaq: ATMI), today announced a joint development agreement with SC Fluids of Nashua, New Hampshire to develop and introduce supercritical fluid materials into semiconductor cleaning processes.
ATMI and SC Fluids are working on innovative technology with environmental benefits for future chip generations where current systems are unlikely to be able to function effectively.
Under the joint development agreement, ATMI and SC Fluids are developing supercritical fluid chemistry and manufacturing processes for cleaning partially processed semiconductor wafers and removing photoresist. As computer chip circuitry continues to shrink while becoming more complex, current wafer cleaning methods are nearing their physical property limits, reducing their effectiveness. In addition, ATMI is making an investment in SC Fluids, Inc. in exchange for equity in the company.
Gene Banucci, ATMI Chief Executive Officer, said, "ATMI is a technology and environmental leader in the semiconductor industry. As a leading technological innovator, we are able to readily recognize the ingenuity SC Fluids has to offer. This joint development agreement matches ATMI's semiconductor materials expertise and experience with SC Fluids' supercritical fluid creativity. Together, we believe we can introduce a new, more effective, environmentally safe and inexpensive method of wafer cleaning to the semiconductor industry."
Neil Hendricks, ATMI's Chief Technologist, said, "Supercritical fluids are amazing, especially their potential when applying them to semiconductor processing. Their absence of surface tension means that the nooks and crannies on a wafer can be effectively cleaned in a manner superior to techniques available today. Because of their properties, we can see our joint development as the enabling technology which changes the way photoresist is removed, how particles are reduced, and how abilities are enhanced to work within the difficult process conditions of low-k technology."
Dr. Kedar Gupta, Chief Executive Officer of SC Fluids stated, "Everyone at SC Fluids is excited to be working with ATMI on this project. Our mission is to revolutionize current semiconductor and MEMS manufacturing processes. Our relationship with ATMI will enhance our ability to quickly achieve our goals."
David Mount, SC Fluids' Vice-President of Technology, said, "SC Fluids has entered into joint development and licensing relationships with IBM Corporation and Los Alamos National Laboratory. These relationships have enabled SC Fluids to combine its expertise with the capabilities of other industry and research leaders in the development of the super critical CO2 process. With these partners -- and ATMI -- we are positioned to become the world leader in advanced systems cleaning and drying equipment and materials."
About SuperCritical Fluids
Most everyone is familiar with the three common states of matter: solid, liquid, or gas. Supercritical fluids act with the properties of a liquid and a gas. SC Fluids is working with naturally occurring carbon dioxide gas, which in its supercritical state, acts as a powerful solvent that can penetrate just about everywhere. Carbon dioxide gas is inexpensive, recyclable, and is environmentally benign. Supercritical fluids are in widespread use across many industries -- the food industry uses supercritical fluids to decaffeinate coffee and to extract the flavoring of hops for beer; the textile industry uses supercritical fluids to clean materials and garments; and waste treatment firms use supercritical fluid for advanced hazardous waste extraction and nuclear waste management.
SC Fluids, Inc. has developed and is commercializing equipment and processes that enable the manufacture of next-generation, high-performance semiconductor devices and micro-electromechanical systems (MEMS). Privately held SC Fluids, Inc., is based in Nashua, New Hampshire and was formed as a subsidiary of GT Equipment Technologies Inc. in April 2000. Dr. Kedar Gupta and Jonathan Talbott are the founders of GT Equipment Technologies, which is a leading supplier in crystal growth equipment technologies for the semiconductor and photovoltaic industries.
ATMI provides specialty materials, and related equipment systems and services for the worldwide semiconductor industry. Related equipment includes delivery, treatment, monitoring, and analytical process monitoring systems. Services include material management, equipment servicing, and thin film wafer deposition. |
