Axcelis Introduces Next Generation Ion Implant Control System
Enhanced Control Software Provides Maximum Tool Productivity and Flexibility
BEVERLY, Mass.--(BUSINESS WIRE)--April 10, 2001--Axcelis Technologies, Inc., (NASDAQ: ACLS - news), has enhanced its implant platform with the introduction of a next-generation control system that allows greater productivity and throughput for new and installed ion implanters. Targeted for use in high-volume fabs, the Axcelis Implant Control System software is specifically designed to meet the automation and productivity needs of today's semiconductor manufacturing lines.
``The Axcelis Implant Control System represents a major advancement in implant tool software and illustrates Axcelis' long-standing commitment to continually enhance tool productivity throughout the life cycle of our equipment and to lower our customers' total cost-of-ownership,'' said Mike Luttati, senior vice president and general manager, ion implantation and rapid thermal processing group of Axcelis. ``With this new control system software, our implanters can run more than one application during a production run, a key feature that delivers high utilization to our entire implant product family. At the same time, the control system gives operators more access to implant process data. These features translate to a more robust and reliable link with a fab's manufacturing execution system and ultimately return the highest possible wafer throughput for our customers.''
The Axcelis Implant Control System supports a broad family of advanced automation software and hardware, as well as e-documentation. Based on Sun Microsystems' Solaris(TM) operating environment, the control system is compatible with third-party high-speed SECS messaging systems (HSMS). This allows improved tool-to-fab communications and increased implant process data collection - significant advantages as semiconductor manufacturers bring more automation to today's 200mm fabs.
Enhanced multitasking capabilities and faster response in the operator graphical user interface improve tool productivity. The control system also allows implant tools to link to multiple data management points within the fab, including remote computers and servers residing outside of the clean room. Other benefits include increased data storage through a combination of new hardware technology and enhanced database software.
The new Implant Control System will begin shipping on all Axcelis High Energy and High Current GSD 200mm product platforms in April 2001. A complimentary upgrade kit is available for installed implanters, which can be field-retrofitted with the new control system software.
About Axcelis Technologies, Inc.
Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity manufacturing solutions for the semiconductor industry. Axcelis is dedicated to the design and manufacturing of high-current, medium-current and high-energy ion implantation equipment; rapid-thermal processing systems; and photostabilization and photoresist stripping equipment. Axcelis Technologies has manufacturing facilities in Beverly and Rockville, Maryland, as well as in Toyo, Japan, through its joint venture with Sumitomo Eaton Nova. The company's Internet address is www.axcelis.com.
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