Varian Semiconductor Inventor Awarded Patent for Acceleration And Analysis Architecture For Ion Implanter
GLOUCESTER, Mass.--(BUSINESS WIRE)--April 11, 2001--Varian Semiconductor Equipment Associates, Inc. (NASDAQ: VSEA - news), a leading supplier of ion implantation systems, today announced that Tony Renau, Ph.D. was awarded U.S. Patent Number 6,130,436 for an advanced ion implant architecture incorporating unique and powerful ion acceleration and analysis technology. The invention and patent, which were assigned to the company, allow Varian Semiconductor's VIISta 810 medium current implanter to improve the yield of semiconductor devices by delivering an ion beam of exceptional species and energy purity.
The VIISta 810 unique beam line architecture incorporates a filter magnet, which removes species contaminants at the source and thereby avoids the acceleration of unwanted species into the main analysis magnet. The result is ultra pure transport of the species to be implanted to the wafer. The beam design also virtually eliminates the possibility of energy contamination, thereby maximizing the VIISta 810's output over the full range of energies.
Varian Semiconductor's next generation VIISta platform uses single wafer technology specifically designed for production of integrated circuits on both 200mm and 300mm wafers and provides fundamental innovations in system design, including a universal end station and VCS control system. This platform also provides higher throughput, lower particle counts and lower wafer risk by managing implants and implanter results one wafer at a time.
Ernest Godshalk, Varian Semiconductor's president and chief operating officer commented, ``We continue to focus research and development efforts on the development of enabling implant technologies for our customers, allowing them to produce the next generation of integrated circuits. These new implant products are simpler, smaller, faster and smarter solutions that keep our customers - and us - on the cutting edge of technology. With the VIISta 810 medium current implanter, Varian Semiconductor continues to meet the technology requirements of our customers, thanks to the intellectual property contributions by Dr. Renau and other innovators in our organization.''
About Varian Semiconductor:
Varian Semiconductor Equipment Associates is a leading producer of ion implantation equipment used in the manufacture of semiconductors. The company is headquartered in Gloucester, Massachusetts, and operates worldwide. Varian Semiconductor maintains a web site at www.vsea.com. The information contained in our web site is not incorporated by reference into this release, and our web site address is included in this release as an inactive textual reference only.
Note: This press release contains forward-looking statements for purposes of the safe harbor provisions under The Private Securities Litigation Reform Act of 1995. For this purpose, the statements concerning the company's operating outlook, market share and technology leadership are forward-looking statements. There are a number of important factors that could cause actual events to differ materially from those suggested or indicated by such forward-looking statements. These include, among others, volatility in the semiconductor equipment industry; economic conditions in general and as they affect the company's customers; significant fluctuations in the company's quarterly operating results; the impact of rapid technological change and the company's dependence on the development and introduction of new products; the company's concentration on ion implantation systems and related products; concentration in the company's customer base and lengthy sales cycles; the highly competitive market in which the company competes; risks of international sales; foreign currency risks; general economic conditions; and other factors identified in the company's Annual Report on Form 10-K, and the most recent Quarterly Reports on Form 10-Q filed with the Securities and Exchange Commission. The company cannot guarantee any future results, levels of activity, performance or achievement. The company undertakes no obligation to update any of the forward-looking statements after the date of this press release. |
