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AMD 230.76-4.1%12:29 PM EST

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To: fyodor_ who wrote (37720)4/29/2001 12:59:25 AM
From: Mani1Read Replies (1) of 275872
 
fyo re <<Smaller than the wavelength of light, eh? ;-)>>

Yes.

The wave length of the light is the reason for all this fuss. Current 248 tools (wave length of 248 nm) does just fine at 250 or 180 nm lithography. But it can not do well at 130 so phase mask shift must be used. By shifting the mask, certain part of the wavelength is filtered. This trick work very well and extended the life span for visible light. But for .25 micron and below, DUV became the light source used by everyone.

All current steppers from ASML, SVG, Nikon and Canon are 248 tools, few next generation tools have been shipped for process development. The next generation tools are have 193 nm light source for the itho.

Robert Grutza knows a lot about this stuff.

Mani
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