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Technology Stocks : Advanced Micro Devices - Moderated (AMD)
AMD 223.54-2.9%Nov 19 3:59 PM EST

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To: fyodor_ who wrote (37720)4/29/2001 5:37:08 PM
From: Bill JacksonRead Replies (1) of 275872
 
fyo, Smaller than a wavelength of light is easy. When you get down to the Abbe limit of 1/2 a wavelength you have pretty much reached the limit, unless you use those diffraction tools that exploit fring reinforcement patterns.
Looking at the masks for those you see all kinds of spurs and incut as well as outcut blocks on the corners that fool the light into beating the Abbe limit.
This from a casual search under the topic, such as.
>>>>
A physical limit to how focused a beam of light can be. Due to its wave nature (delocalization), light can only be focused to a point as small as half its wavelength by traditional methods. Thus, in order to obtain optical resolution below the wavelength of the light being used, this barrier must be passed. Also known as the Abbe barrier.

Some pages of interest.
semiconductorfabtech.com
chipcenter.com

Bill
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