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Technology Stocks : Semi-Equips - Buy when BLOOD is running in the streets!
LRCX 159.74+1.0%Dec 3 3:59 PM EST
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To: Cary Salsberg who started this subject5/14/2001 4:55:37 PM
From: James Calladine   of 10921
 
FROM THE AMAT THREAD:

<<<Infineon demonstrates technology to produce 0.05- to 0.04-micron chips
Semiconductor Business News
(05/14/01 14:30 p.m. EST)
MUNICH, Germany -- Infineon Technologies AG here today announced a new chip-manufacturing technology that could enable the development of ICs at the 40- and 50-nm nodes in the 2011 to 2014 time frame.
At Infineon's Munich Corporate Research Labs, the company said it has produced ICs at the 40- to 50-nm nodes by using new metalization process. The company also demonstrated the process by using today's standard silicon wafers and chip-equipment in the cleanroom at International Sematech, an Austin, Tex-based chip consortium.
Lithography tools required to process chips at 40- to 50-nm nodes do not exist. But Infineon overcame this issue by embedding the grooves of a dielectric film used for electrical isolation in the chip.
It also used a spacer technique to narrow the mask openings for pattern transfer into the dielectric film. This allows the production of structures with lateral dimensions far below the feature sizes that can be realized with today's most advanced lithography manufacturing equipment.
This technique also demonstrates the extendibility of the damascene technique--the state-of-the-art approach in the semiconductor industry to realize advanced chip metallization.
In this technique, grooves and holes are filled by depositing metal over the wafer followed by a complete removal of all metal covering the filled structures by chemical mechanical polishing.>>>

Best wishes,
Jim
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