>Did intel cancel 193nm Litho Equipment Orders?<
Nobody's talking, but it does provide the best fit for the diverse pieces of information filtering through.
---That's one interpretation. Another would be:
* Intel expecs a 193nm Stepper for the F22 0.13u ramp. Due to limited availability, this Stepper would most likely be used for Critical Layers only. Let's call this Stepper #1.
* For other non-critical layers, intel installs several 248nm Steppers. For argument sake, let's say 2 Steppers, a primary and backup. and call them Stepper #2 and Stepper #3.
* Intel begins the installation of the required infrastructure to support all 3 Steppers, ie: Pedestals, Electrical, Cooling fluid lines, etc etc etc..
THEN, SVGL announces a 3 month delay in delivery of Stepper #1.
* Infrastructure installation continues on all 3 Steppers, but now, Stepper #2 is redesignated as a 248nm Phase Shifted Critical Layer Stepper, with Stepper #3 supporting the other layers. At the same time, the scheduled installation of Stepper #4 is accelerated.
* Intel's Mask Manufacturing Operation (IMO) cuts a "deal" with another company to acquire their Phase Shift Mask Technology, and begins manufacturing of the required Phase Shift Masks for the 248nm Steppers. (This "deal" has already been announced)
* When the 193nm stepper is ready, the "plumbing" is already in place, and Stepper #1 can take over critial layer duty responsability, freeing the 248nm Steppers #2 and #3 for extra non-critical layer processing capacity.
With no cancellation of orders. It could also happen that way..... couldn't it?
Semi |
