Newport Corp. Granted Patent on Core Technology to Enhance Semiconductor Equipment Manufacturing
Two Other Patents Pending
Technology Increases Yields and Throughput
IRVINE, Calif.--(BUSINESS WIRE)--July 5, 2001--Newport Corp. (Nasdaq:NEWP - news) today announced that it has been issued a U.S. patent that extends its leadership in next-generation technology in the fabrication of semiconductor equipment products.
Newport's U.S. Patent No. 6,256,555, for a 300mm edge-grip robotic end effector apparatus, allows semiconductor manufacturers to reliably handle 300mm wafers by only their edges during fabrication and testing. This new tool ensures a simpler, more reliable and faster manufacturing process with a significantly reduced possibility of wafer or cassette contamination. Newport's leadership position in supplying automation technology to semiconductor equipment manufacturers is also supported by several other patents that are pending for related technology, including a patent involving a ``self-teaching'' robot to ensure accurate alignment during wafer handling.
``These innovations are designed to improve yields and lower our customers' total cost of ownership, and are examples of the advanced technology we have added to our portfolio through our recent merger with Kensington laboratories,'' said Robert Deuster, chairman and chief executive officer. ``The inventions help semiconductor equipment manufacturers minimize wafer mishandling, especially as they move to larger 300mm wafer sizes, and to increase the speed and throughput of their systems.
``With this new technology, Newport takes another step forward in supporting our customers' efforts to improve cycle times and reduce costs,'' Deuster said.
Paul Bacchi, co-inventor and general manager of Newport-Kensington, noted that work on the edge-grip patent began in 1997 at Kensington Laboratories, and resulted in several patent applications. Since then, more than 1,000 wafer-handling robots with edge-grip technology have been shipped.
``With more than 1,000 units in the field, the technology has been an overwhelming commercial success,'' Bacchi said. ``The issuance of the first edge-grip patent in the semiconductor industry recognizes and protects this important Newport technology and assures technical leadership in this area. We anticipate that additional patents will issue shortly.''
Newport's patented edge-grip technology:
Supports safe and quick operational performance;
Lowers initial manufacturing costs, increases ``uptime'' with fewer repairs and lower maintenance; and
Promotes wafer safety, even in total power failure during the manufacturing process.
``The end effector works by lifting and pulling the wafer back slightly before gripping, ensuring no contact between the wafer and the cassette,'' Bacchi said. ``This is a significant benefit and a unique process compared with other 300mm wafer-handling methods because the others have to push the wafer first, and risk hitting the cassette.''
Commenting on the ``self-teach'' robotic system, Bacchi said: ``Several patents have been allowed that support our self-teaching robotic system. This technology allows the robotic system to determine whether a misalignment exists between the cassette and the wafer, which, in turn, enables rapid, reliable operation even if the wafer is not in the correct position. To enable the self-teaching capability, the end effectors in Newport 300mm robots are uniquely equipped with a fiber optic sensor that ''sees`` the location of the wafer.
``The result for the customer is increased yield and throughput since the system operates reliably at full speed, even when misalignments exist. It also minimizes mean time to repair and reduces cost of ownership by automating the robot-teaching process, making it a quantitative process supported by the self-teaching capability of the robot instead of a qualitative process dependent on the skill of the installing engineer or technician.
``The self-teach technology puts an automation expert in the system itself, and allows semiconductor wafer equipment to be brought online in less time, and to operate reliably at higher throughput rates. This versatile technology can be deployed into a wide range of systems, including those which operate with or without pre-aligners,'' Bacchi said.
About Newport Corp.
Newport Corp. is a global leader in the design, manufacture and marketing of high-precision components, instruments and integrated systems to the fiber optic communications, semiconductor equipment, aerospace, research and industrial metrology markets. The company's innovative products are designed to enhance productivity and capabilities in test and measurement and automated assembly for precision manufacturing, engineering and research applications. Customers include Fortune 500 corporations, technology companies and research laboratories in commercial, academic and government sectors worldwide. Newport is part of the Russell 1000 Index and on March 1, 2001, was added to Standard & Poor's Midcap 400 Index.
This news release contains forward-looking statements that are based on current expectations and involve risks and uncertainties. Without limiting the generality of the foregoing, words such as ``may,'' ``will,'' ``expect,'' ``believe,'' ``anticipate,'' ``intend,'' ``could,'' ``estimate'' or ``continue'' or the negative or other variations thereof or comparable terminology are intended to identify forward-looking statements. In addition, any statements that refer to expectations, projections or other characterizations of future events or circumstances are forward-looking statements. As discussed in Newport's Annual Report on Form 10-K for the year ended Dec. 31, 2000, and its subsequent Securities and Exchange Commission reports, assumptions relating to the foregoing involve judgments and risks with respect to, among other things, future economic conditions, the ability of the company to obtain patents on its technology, competitive and market conditions, including those in Europe and Asia and those related to its strategic markets, whether its products, particularly those targeting the company's strategic markets, will continue to achieve customer acceptance, the risks of power interruptions and electricity rate increases and future business decisions, all of which are difficult or impossible to predict accurately and many of which are beyond the control of Newport. Although Newport believes that the assumptions underlying the forward-looking statements are reasonable, any of the assumptions could prove inaccurate and, therefore, there can be no assurance that the results contemplated in forward-looking statements will be realized. In light of the significant uncertainties inherent in the forward-looking information included herein, the inclusion of such information should not be regarded as a representation by Newport or any other person that Newport's objectives or plans will be achieved. Newport undertakes no obligation to revise the forward-looking statements contained herein to reflect events or circumstances after the date hereof or to reflect the occurrence of unanticipated events.
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Contact:
Newport Corp., Irvine
Charles F. Cargile, 949/253-1273
investor@newport.com
Web site: www.newport.com
or
PondelWilkinson MS&L, Los Angeles
Cecilia A. Wilkinson/Mike Pollock, 310/207-9300
investor@pondel.com
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