<font color=red>Intel kills plan to use SVG's 193-nm scanners in production due to delays
Chip giant opens up competition for its next-generation lithography tool business
By Mark LaPedus
Semiconductor Business News
(07/31/01 13:42 p.m. EST)
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SANTA CLARA, Calif. -- Intel Corp. has scrapped its production plans to use 193-nm, argon-fluoride (ArF) lithography tools from Silicon Valley Group Inc. because of delays in tool shipments. The decision, confirmed by an Intel official in an interview with SBN, apparently kills a $100 million tool order.
The decision is also a major setback for ASM Lithography, which acquired SVG for $1.6 billion in stock two months ago to gain access to advanced scanner technologies and Intel's lithography business (see May 22 story). ASML officials in the Netherlands refused to comment on Intel's decision.
SVG "had a window of opportunity for 193-nm scanners at Intel," said Mark T. Bohr, an Intel Fellow and director of process architecture and integration at the Santa Clara chip giant. "That window has closed," Bohr said in an interview on Monday.
Intel is now opening up the evaluation of 193-nm scanners from several suppliers, including ASML and the acquired SVG Lithography operation in Wilton, Conn. But after several months of delays, it now appears that SVG's Micrascan 193 high-numerical aperture (HNA) scanner is no longer a shoo-in at Intel.
Eighteen months ago, Intel was reportedly the "leading microprocessor manufacturer" placing a $100 million order for SVG's Micrascan 193 tools (see Dec. 15, 1999, story). And since then, SVG had to push back delivery of Micrascan 193 systems to Intel.
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