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Technology Stocks : General Lithography
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To: Andrew Vance who wrote (1264)8/9/2001 3:17:13 PM
From: Artslaw  Read Replies (2) of 1305
 
Sorry Andrew--I missed the argument where this patent "has to be dealt with by every manufacturer or step and scans in the industry". This patent covers the use of multiple reticles for the same layer. Is this common? I have never heard of it and would rather not have to stitch my design together in the lateral directions (x, y). Worrying about registration (alignment) at all the boundaries, rather than just the vertical direction (z), would be a hassle. I suppose one would just thicken all the lines that cross those edges in the design, but I say just make the mask smaller. Seems like a yield killer.

Steve
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