>>You do of course realize that there are about 2 companies >>that make 193nm steppers?
ASML,SVG and Nikon right?
--Actually, it's ASML, Nikon, and Canon. SVGL is now a subsidiary of ASML
>>You do of course realize that Intel has orders with both >>companies?
Had orders with SVG but because of delays they are evaluating the others
--Actually, intel already has a well established relationship with Nikon, and according to this story published recently, the belief is that Nikon is going to ship it's 193nm Stepper to intel:
edtn.com
"In fact, Intel mainly uses two lithography vendors--Nikon and SVG. Now it is believed that Nikon will ship its new 193-nm tool to Intel and other chip customers as the battle for next-generation lithography continues to heat up."
>>You do of course realize that no one has indicated that >>they are actually using 193nm for 0.13 micron?
fingolfen, in that respect you are correct, Intel has maintained that there is nothing wrong with their .13 ramp but the did NOT say that they took delivery of the .13 Steppers. In fact that's all they said.
--So, here you seem to mixing up the 193nm Steppers, with the 0.13u Steppers. As has been stated several times, 193nm Steppers are not needed for the 0.13u Ramp.
>>You do of course realize that even if the steppers were >>available, then there's the question of the quality of >>the photoresist?
No clue
Constantine
I suspect that for this one, Fin does have a clue.
The bottom line is, intel does not need 193nm steppers to ramp 0.13u, if they get them fine, if not, fine. And whether it is ASML, SVGL, or Nikon, intel is bringing on-line at least 3 fabs with 0.13u Process now. In contrast, AMD's conversion of 1 Fab is sometime in the future. If there are a limited number of steppers available, I have a feeling that intel will be ahead of AMD in line to receive them.
Semi |
