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Technology Stocks : General Lithography

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To: FJB who wrote (405)	6/23/1997 10:21:00 PM
From: James Word	of 1305

Robert: Re PSM and SVGI Regarding the interesting article you referred to on phase shift masks etc. According to my ineterpretation of the article, yes you should be very worried about your SVG holdings . . . GOING UP! What the article basically said is that PSM will allow 248nm optical steppers (which SVG makes) to be used even longer than expected. The big "looser" appears to be the usual one, X-Ray lithography. This means that companies have an even bigger reason to buy into 248nm Deep UV steppers since they will last an extra generation. PSM's basically increase resolution and depth-of-focus of optical litho tools. Step and scan technology doesn't do this and therefore is not really a competing technology. PSM reticles are difficult to manufacture since they require multiple patterning/etching steps. The layout of such reticles is also very dependent on the pattern being printed. PSM technology is sometimes thought of as wavefront engineering because the PSM "pre-corrects" the image to be printed on the wafer. Hope this helps James Word

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