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Technology Stocks : MKS Instruments, Inc. (MKSI)
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To: John Finley who wrote (76)10/12/2001 1:55:22 PM
From: kinkblot  Read Replies (1) of 104
 
Atomic Layer Deposition Breaks Barriers

by Alexander E. Braun, Semiconductor International 10/01/01, page 52 (cover story)

e-insite.net

"The switch from CVD to ALD — it's an incremental, although critical, hardware change. Our existing CVD process chambers can be upgraded to ALD chambers. ALD is also chemical deposition; you just do it differently. The transition will be easier."
--Moris Kori, Applied Materials

Instruments for CVD have been an area of strength for MKS, so I'd expect them to participate in any 'upgrading' for ALD.

WT
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