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Technology Stocks : General Lithography

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To: Mark Jacox who wrote (413)	6/26/1997 9:06:00 PM
From: James Word	of 1305

Mark, RE: DUV vs. X-RAY. "Many managers are now re-reconsidering the DUV technology especially since X Ray lithography is all that is on the horizon that can take them down eventually to the .15 - .05 area." While it is true that X-Ray has higher resolution, that is not the only issue. Most companies haven't been doing much research into XRay, and would therefore have enormous entry costs into X Ray. Another issue is, where are you going to get your X Ray reticles from? Only IBM makes them for sale commercially, and not many other companies have an in-house mask shop capable of their manufacture. Another problem is, where are you going to buy the dozen or so steppers that you'd need for a leading edge fab? Right now the tools are only available in research quantities. Since DUV lithography is quite similar to i-line in the issues involved, most litho people will want to stay with what they know for some time to come. My guess is that DUV at 248nm and 193nm will continue to perform to the .18-.15um era using phase shift reticles. James Word.

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