eahJosef, AMD is using ASML.
A quick google search confirms AMD is using asml 193-nm scanners. No clue as to their success.
survivin
"...Some sources assume ASML can happen to be among suppliers of such equipment for Intel. Not so long ago (on 10 July) a major Intel's competitor, AMD, started delivering 193 nm lithographic scanners AT:1100 developed by ASML. The new lithographic scanner AT:1100 can be used for production of 200 mm - 300 mm silicon wafers with production standards up to 0.10 micron. Lithographic lenses StarLith 1100 for the new device were delivered by an old ASML's partner Carl Zeiss. AT:1100 is meant, first of all, for production of modern chips DRAM and for logic, and can be used in the production process of microprocessors with the number of transistors more than 75 million. Apart from AMD, Infineon, Philips, Micron and TSMC have placed their orders for purchasing AT:1100... ."
See google.com
"...The 193 nm lithography cell at AMD's Submicron Development Center (AMD-SDC) consists of an ASML5500/900 ArF 4× scanner and a TEL Mark 8 track. We used a standard 193 nm resist process (PAR700/CD-26) on SiON wafer substrates, exposing the resist at 0.63 NA, 0.60 s, with circular illumination and targeting the dose-to-size for clear and darkfield patterns on different wafers... ."
See 209.67.253.149
<edit>
This article claims the AT 1100 isn't shipping until early 2002, and implies it was merely announced in July.
ASML drops SVG-developed 193-nm scanner to focus on Twinscan platform
siliconstrategies.com
...
"Instead of supporting two 193-nm step-and-scan exposure platforms, the Veldhoven-based lithography supplier said it will concentrate on its Twinscan AT:1100 system. Officially introduced last summer, the Twinscan AT:1100 is the dual-stage scanner developed for volume production applications in 300-mm wafer fabs. ASML says the system has the industry's highest numerical aperture ArF (argon-fluoride) lens (see July 8 story).
"Our decision was made after close consultation with customers and we expect to ship our Twinscan AT:1100 product in early 2002 as a result of that," said Doug Dunn, president and CEO of ASML. 'It is very important for ASML to concentrate our talent and leading edge technology on one platform, the industry standard Twinscan."
... . |
