(COMTEX) B: Tegal Announces Three Joint Development Projects With Major
B: Tegal Announces Three Joint Development Projects With Major Japanese
Electronic Firms
PETALUMA, Calif., Dec 3, 2001 (BUSINESS WIRE) -- Tegal Corporation
(Nasdaq:TGAL) today announced that it has entered into three new joint
development partnerships with major Japanese microelectronic firms. All of the
partnership efforts target the manufacturing processes needed for
next-generation, non-volatile memory technology -- especially for
next-generation ferroelectric random access memory (FeRAM) and magnetic random
access memory (MRAM) devices.
"Tegal is the world's leading supplier of etch systems for the new materials
needed to produce non-volatile memories. Tegal has worked for more than five
years to develop the etch technologies utilized by our customers as they migrate
towards production volumes of advanced non-volatile memory devices. These three
joint partnerships with existing customers include expanded hardware and process
development efforts aimed at accelerating the development of these key memory
technologies," said Jim McKibben, vice president of worldwide marketing and
sales for Tegal.
Two of the partnerships are specifically designated to focus on third-generation
FeRAM stack etch development efforts, which extends Tegal's patented HRe- (TM)
source technology to address 0.25-micron and smaller cell features. A key
component in this effort is the introduction of a new high-temperature
processing capability with the HT ESC upgrade for Tegal's 6540 HRe- (TM) system.
The HT ESC allows etch processing of advanced PZT and SBT FeRAM stacks with
platinum and iridium electrodes at wafer temperatures from 150 degrees C to 500
degrees C.
The third joint development program is in the area of next-generation MRAM
devices, seen by industry experts as an exciting alternative to FeRAM for
non-volatile memory technology. This effort centers on the recently announced
delivery of the first Tegal 6550 Spectra* system for MRAM production.
Tegal representatives will be available to discuss the partnerships during the
SEMICON Japan 2001 tradeshow, being held December 5th through the 7th, 2001 at
Makuhari Messe, Chiba, Japan. Customers and news media are invited to visit
Tegal at booth No. 2-A404.
About Tegal Corporation
Tegal Corporation, headquartered in Petaluma, Calif., is a leading designer and
manufacturer of plasma etch systems used in the production of opto-telecom
devices, integrated circuits (ICs) and other related microelectronics devices.
Etching is a key process and must be repeated multiple times in the production
of these devices. Tegal markets and services its systems in all major
IC-producing regions of the world. Tegal was recently granted its fifth VLSI
Research, Inc Ten Best award in recognition of its superior customer support and
service. More information is available on Tegal's Web site at www.tegal.com.
Safe Harbor Statement
Except for historical information, the matters discussed in this news release
are forward-looking statements. Such forward-looking statements are subject to
certain risks and uncertainties including, but not limited to the company's
ability to successfully develop non-volatile memory technology for
third-generation ferroelectric random access memory (FeRAM) and magnetic random
access memory (MRAM) devices with its Japanese partners, industry conditions,
economic conditions, acceptance of new technologies, the growth of the wireless
market, as well as other risks set forth in the Company's periodic filings with
the Securities and Exchange Commission.
CONTACT: Tegal Corporation
Jim McKibben, 707/763-5600
jmckibben@tegal.com
or
Loomis Group, Inc.
Megan Goodson, 415/882-9494
goodsonm@loomisgroup.com
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KEYWORD: CALIFORNIA JAPAN INTERNATIONAL ASIA PACIFIC
INDUSTRY KEYWORD: COMPUTERS/ELECTRONICS
HARDWARE
MANUFACTURING
PRODUCT
SOURCE:
Tegal
Corporation
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