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To: Nick Michell who wrote (2940)12/15/2001 3:43:17 PM
From: Andrew Vance  Read Replies (1) of 2946
 
Nikon has part of the business for sub micron, but ASML has (IMO) a great Twinscan system. The Micrascan was never a good system, even if Intel used it. You have ot remeber that the Micrascan was almost force fed to Sematech through IBM originally. As a Sematech member, Intel and a few others got drawn into the picture, but the best systems for DUV never had the Micrascan in the top 3 contention, most Sematech members went with Nikon and ASML, when push came to shove.

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