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Technology Stocks : General Lithography
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To: Ian@SI who wrote (428)7/1/1997 1:50:00 PM
From: Ritz   of 1305
 
Ian:

Perhaps UTEK and CYMI are referring to 193nm as EUV, I don't know. CYMI is of course working on an ArF laser for 193nm. 193nm is not generally referred to as EUV in the industry, however. It's not that much of a jump from 254nm (at least from the stepper perspective, resists have been a major bottleneck at .18), and you can still use refracting optics. Both Nikon and SVGI have already announced 193nm steppers due next year. What I was referring to as EUV is the research being done into a all-reflective optics stepper by Intel, SVGI and (I believe) others.

-Ritz
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