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Technology Stocks : General Lithography
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To: Ritz who wrote (432)7/1/1997 3:33:00 PM
From: unotooth   of 1305
 
Ritz-

The EuV work is currently at Sandia and Lawrence Livermore. The
wavelength is 13.4nm, driven by reflector technology. A backup
wavelength is around 11nm. Both are proposed to use diode pumped
lasers (1500W) impinging on a supersonic Xe gas jet.......

-Toothy
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