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Technology Stocks : General Lithography
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To: Andrew Vance who wrote (425)7/3/1997 10:11:00 AM
From: WALLY THE SANDCRAB   of 1305
 
Ho Andrew:

the following link talks about Canon shipping a 300 mm DUV tool.

techweb.cmp.com

I think this may have been discussed before, but my sense is that lithography should be the one area which doesn't really care too much about the size of the wafer, except insofar as the stage robots, etc. can accomodate the extra travel. The article seems to imply lack of development of 300 mm litho tools. any comments?

Thanks

Wally
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