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Technology Stocks : Mattson Technology

MTSN 3.600

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May 12 5:00 PM EST

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To: Alan Gallaspy who wrote (3533)	3/6/2002 8:06:52 PM
From: SemiBull	Read Replies (1) of 3661

Mattson wants to stop shipments of Dainippon Screen systems after jury verdict URL: siliconstrategies.com FREMONT, Calif.--After a four-week jury trial, Mattson Technology Inc. here said it has won a verdict in a U.S. patent lawsuit against Japan's Dainippon Screen Manufacturing Co. Ltd. (DNS) for infringement of technology in wafer drying systems. The legal battle over drying technology in wet-wafer cleaning systems began nearly five years ago when CFM Technologies Inc. filed suit against DNS. Mattson acquired Pennsylvania-based CFM last year. In the lawsuit, CFM claimed that six different DNS wet-processing systems infringed upon two of its patents for drying technologies. The Japanese equipment supplier denied that its machines infringed upon those patents, and it argued that the patents were invalid. Mattson announced on late Tuesday that the San Jose jury found that each of the DNS systems infringed upon the two patents. The jury also found the patent to be valid, according to the company. A response from DNS was not immediately available. "We have watched DNS take market share while using technology that we believed was covered by our patents," said David J. Ferran, president of Mattson's Wet Processing Division. "Drying technology is a critical element in the wet processing of semiconductor wafers, and we are committed to protecting the intellectual property created by our significant investment in research and development." Mattson Technology said it will seek unspecified damages for the patent infringement, and it will request an immediate injunction against shipments of infringing DNS products into the U.S. market. Kyoto-based Dainippon Screen Manufacturing was the world's seven largest supplier of semiconductor manufacturing equipment in 2001 with revenues of $1.1 billion, according to an industry ranking from VLSI Research Inc. (see Feb. 11 story).

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