Semi,
Assuming the expansion is for additional tools to process additional layers, is there a need for proximity of the tools on a particular line, meaning placement of all of the other tools need to be re-arranged in order to "absorb" the new tools?
Joe
Maybe, that's more an IE (Idustrial Engineer) decision. Hopefully, the IE will work closely with the PE (Process Engineer), since the PE will probably have a better idea of how the workers do the actual processing work.
All modern Fabs have POD systems (despite what "some" think), but it is SOMETIMES much quicker to pick up a box and carry it 10 feet to the next Process Tool than it is to use the automation to store the lot, put the lot box into the pod system, have the system carry it to the next area, use the automation to pull the box out, and have the pod system deliver it.
Other times, there's no way to put the tools close together for various reasons (again, an IE determination), and in that case, having a person walk all the way across a Mega Fab would be too time consuming, since there might be nobody running their tool while they transported the lot. Not to mention the increased possability of dropping the wafers. Then it would be better to use the Automated Transport System.
Ripping a tool out to put another one in is a costly step that has to be carefully considered. I heard that moving a simple Bake Oven (No Process gases, or requal, just the electrical and hardware) costs $1,000. Imagine what it would cost to move a Stepper.
Semi |
