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Technology Stocks : Advanced Micro Devices - Moderated (AMD)
AMD 200.28-4.2%11:56 AM EST

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To: semiconeng who wrote (73860)3/7/2002 11:51:49 AM
From: Bill JacksonRead Replies (1) of 275872
 
Semi, Do they use the same mask for a small area and then used it again and again. Logically a smaller sized CPU would get more on the mask. Let us say this mask holds a 3x3 grid of CPUs at .18 and a 4x4 grid at .13(these are arbitrary picks). Since it would take the same number of step and repeats to do the wafer unless exposure times varied with feature size?) then the throughput would be the same. It is also possible that with smaller features the machine takes more time to move and align for the exposure due to the smaller features?

If they made one huge mask that covered the whole wafer then edge effects would make problems and you may have to optimize the focus to minimize edge loss and that give you center losses?

Is it any better with reflective lenses versus transmissive lenses?

bill
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