SpeedFam-IPEC to Webcast 3Q02 Teleconference Live on March 26
  CHANDLER, Ariz.--(BUSINESS WIRE)--March 13, 2002--On March 26, SpeedFam-IPEC, Inc. (Nasdaq:SFAM - news) plans to announce its financial results for the third fiscal quarter ended March 2, 2002. SpeedFam-IPEC management's teleconference on quarterly results will be webcast live for all investors through CCBN, and a webcast replay will be available for seven days. 
  How to Participate 
      SpeedFam-IPEC 3Q02 Teleconference     March 26, 2002     2:00 p.m. PT / 5:00 p.m. ET
  Go to the Investor Relations page of the SpeedFam-IPEC website at www.sfamipec.com and click on the CCBN icon. A phone replay will also be available for seven days after the live call at 703-326-3020, access code #5887656. 
  SpeedFam-IPEC, Inc. 
  SpeedFam-IPEC, Inc. is a pioneer and innovator in the manufacture of chemical mechanical planarization (CMP) systems used in the fabrication of advanced semiconductor devices. With more than 1,300 CMP systems installed worldwide, the company enables the development of next-generation integrated circuit technology through its leading-edge polishing systems. SpeedFam-IPEC also markets and distributes parts used in CMP and precision surface processing. With headquarters in Chandler, Ariz., and offices throughout the world, SpeedFam-IPEC is publicly traded on Nasdaq under the symbol SFAM. The company's web site URL is www.sfamipec.com. 
  The foregoing announcement is a forward-looking statement, and you are cautioned that the time and/or manner of the teleconference, webcast and replay may change for technical or administrative reasons outside of the company's control. 
  -------------------------------------------------------------------------------- Contact:       SpeedFam-IPEC Investor Relations      Lisa Lyscio, 480/705-2119 |