Andrew,
<What we need to do is find out whose laser is being used in what systems. That is, we know CYMI is built into the SVGL Micrascan. It would be an interesting exercise to list the stepper manufacturer versus the laser supplier.> I, for one, would truly like to see the results of that exercise!
I just came from the CYMI thread looking for similar information, hoping you could help. Dave Horne had stated, "..the laser illumination source is not part of the lithography tool proper; it resides outside the clean room, connecting via "plumbing" to the tool. Unfortunately, I think this means any of the 5 litho-tool manufactures could switch to another laser supplier at any time, if they so desired."
To what extent is a DUV laser system interchangeable to any of the steppers now used in a production environment? Is it probable that System X could be supplanted by System Y at some mid-point of production, or would modification costs; downtime; learning curve; etc preclude the changeover? Your comments are always appreciated.
Thanks,
Howie |
