FSI Receives Volume Order for ZETA 300 Surface Conditioning Systems From Leading Semiconductor Manufacturer
300-mm Tools to be Installed in European Manufacturing Facility
MINNEAPOLIS--(BUSINESS WIRE)--June 17, 2002-- Continuing the momentum of customer acceptance for its 300-mm solutions, FSI International, Inc. (Nasdaq:FSII - News) today announced that it has received a purchase order for three ZETA® 300 Surface Conditioning Systems from a leading global semiconductor manufacturer. The 300-mm tools will be used for front-end-of-line (FEOL) and back-end-of-line (BEOL) wafer cleaning applications, including Cu/low-k interconnect post-ash clean.
"FSI is well positioned to supply efficient and innovative technology solutions for sub-0.13 micron processing. The ZETA 300 Systems will support this customer's transition to 300-mm production and allow for the successful adoption of new materials required for smaller geometries," said John Ely, president of FSI's Surface Conditioning Division and corporate vice president. "For example, the ZETA 300 Systems will support the customer's implementation of copper interconnect technology. Not only does the ZETA System support a number of conventional chemistries, it excels in applications using semi-aqueous solvent and other new chemistries that enable faster cycle time, while supporting many environmental, health and safety initiatives."
The ZETA 300 System provides the most advanced surface conditioning process control available through a combination of features, including a single closed nitrogen-purged chamber, temperature and flow-compensated chemical processing and an on-board diagnostic system. Providing high-productivity process solutions for both FEOL and BEOL strip, etch and clean applications, the ZETA 300 platform ranges in price from $2.0 million to $3.0 million depending on the model and configuration.
FSI International Inc., a global supplier of wafer cleaning and resist processing equipment and technology, delivers economic and technical advantages for current and emerging microelectronics manufacturing challenges. Using the company's broad portfolio of products, which include immersion, spray, vapor and CryoKinetic systems for wafer cleaning, and resist processing systems for wafer coating and developing, customers are able to efficiently achieve their goals. FSI's customers include microelectronics manufacturers located throughout North America, Europe, Japan and the Asia-Pacific region.
FSI maintains a Web site at fsi-intl.com.
--------------------------------------------------------------------------------
Contact:
FSI International Inc., Minneapolis
Trade Media:
Laurie Walker, 952/448-8066
or
Financial Media and Investors:
Benno Sand, 952/448-8936 |
