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Technology Stocks : General Lithography
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To: Jonathan Bartlett who wrote (477)7/17/1997 9:54:00 AM
From: Yousef   of 1305
 
Jon,

Re: "could you give a brief explanation of "resist tracks"?"

Yes, a resist track is the equipment used to apply the photoresist, spin
to appropriate thickness, bake off solvents, and then develop the image.
These are usually directly linked (hooked together) with the stepper,
so throughput matching between resist track and stepper is important.
These pieces of equipment cost about 1.5 -> 2 M$ and IMO, the best are
made by TEL and DNS.

I am not that familiar with US vendors in this area, but I believe that
SVGL and perhaps FSI both manufacture this type of equipment.

Yousef
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