HOWIE, HOWIE, HOWIE - you are gonna like this answer.
Consider that the DUV steppers consist of 3 parts. The DUV source, the DUV stepper, AND the interface that connects them together (including the software that controls both).
With that said (and time is short on this terminal), the question really is, "Who is stupid enough not to design in the CYMI units into their systems?" Answer: NO ONE!!!!!
ISI, Canon, Nikon, SVGL, ASMLF and whoever I may have left out in my harried state, ALL use the CYMI product. The competition to CYMI is Komatsu and Lambda Physik. LP deals alot in the Biomedical and metrology business along with the stepper industry but is not as focused in the stepper section as CYMI.
You cannot just switch a Komatsu or a Lambda for a CYMI without some work on the interface. So it is not plug and play. Therefore, once CYMI is intalled, you have addtional work to switch it out for something else.
Finally, it is my understanding that the end user specifies which source they want incorporated with the systems they order.
Bye for now. Just about to lose access to internet.
Andrew |
