Mattson Technology Receives Multimillion Dollar Order for Multiple Strip Systems from Major US Chipmaker
Wednesday November 6, 8:33 am ET
FREMONT, Calif.--(BUSINESS WIRE)--Nov. 6, 2002--Mattson Technology, Inc. (Nasdaq:MTSN - News), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced that it has received a multimillion dollar order for multiple Aspen photoresist strip systems from a leading North American integrated chip (IC) manufacturer. The Aspen ICP Strip tools, which are scheduled to begin shipping in the fourth quarter of 2002, will be used for bulk resist strip and high-dose implant strip (HDIS) applications in the chipmaker's flash memory and logic fabs.
"We have established an extensive installed base at this long-time customer, one of the industry's leading flash memory manufacturers," said Randy Matsuda, vice president and general manager of the Films and Etch product group at Mattson Technology. "We are pleased to continue the strong relationship with this chipmaker by providing strip solutions with the throughput, flexibility and performance advantages necessary to meet the productivity requirements of advanced IC manufacturing. This order represents our customer's continued reliance on Mattson Technology for proven, high-productivity strip solutions and further reinforces our leadership position in the dry strip market."
The dual-chamber Aspen ICP Strip system, which provides complete dry resist and residue removal capability, was selected for its superior performance, proven reliability and high productivity.
About the Aspen ICP Strip
The Aspen ICP Strip system features Mattson Technology's proprietary inductively coupled plasma (ICP) source for advanced sub-micron applications that require ultra-low contamination levels. The system combines ultra-low damage and contamination drive-in with high throughput and effectively strips resist and residue, reducing the need for post-strip chemical processing. The Aspen ICP Strip system offers the most advanced technology on a high productivity platform, providing chipmakers the process performance they require for advanced device manufacturing at the low cost of ownership they need to compete in today's market.
About Mattson Technology, Inc.
Mattson Technology, Inc. is a leading supplier of semiconductor wafer processing equipment used in "front-end" fabrication of integrated circuits. The company is a market leader in dry strip, RTP, wet processing and PECVD equipment, and its products combine advanced process technology on high-productivity platforms backed by industry-leading support. Since beginning operations in 1989, the company's core vision has been to help bring technology leadership and productivity gains to semiconductor manufacturers worldwide. Headquartered in Fremont, Calif., the company maintains sales and support centers throughout the United States, Europe and Asia. For more information, please contact Mattson Technology, Inc., 2800 Bayview Drive, Fremont, Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: 510/226-8241. Internet: www.mattson.com.
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Contact:
Mattson Technology, Inc., Fremont
Lauren Vu, 510/492-6518 (Public Relations)
lauren.vu@mattson.com
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Source: Mattson Technology, Inc. |
