Tokyo Electron Chooses Rudolph for Integrated Metrology in Front-End Process Equipment
Thursday December 5, 7:01 am ET
Rudolph is selected as a Class 1 supplier of integrated metrology systems by TEL
FLANDERS, N.J., Dec. 5 /PRNewswire-FirstCall/ -- Rudolph Technologies, Inc. (Nasdaq: RTEC - News), a leading provider of process control equipment for thin film measurement and for macro defect inspection during IC manufacturing, announced today that Tokyo Electron Limited (TEL), Tokyo, Japan, has chosen Rudolph as a "Class 1" film thickness Integrated Metrology (IM) supplier. The integrated system is designed to be built into the process equipment and to increase yield by bringing high-precision measurements on-line with a response time not possible with stand-alone metrology.
"This is an exciting opportunity for both IM technology and TEL," noted Greg Wolf, Technology Director, at Rudolph. "Integrated metrology will be an enabling technology for next generation semiconductor devices as it will provide valuable input to a process tool for tight feedback and feed-forward control of critical process parameters. The RTEC i-MOD AF(TM) (All Film) system provides the highest degree of precision for thin, thick, and multi-layer films. This is invaluable as there will be fewer simple single-layer films in future product applications."
The Rudolph system provides ellipsometry technology in an integrated tool, which is more advanced and better suited to the control of dielectric films than tools based on reflectometry and interferometry techniques. The i-MOD AF system is well suited for process control of a broad range of films. The integrated system was compared against competing products on numerous films and under different process conditions before being chosen by TEL.
Rudolph announced the formation of its Integrated Metrology business unit in April 2002 and exhibited the i-MOD(TM) at SEMICON West 2002. For more information, visit Rudolph's web site at rudolphtech.com.
About Rudolph Technologies, Inc.
Rudolph Technologies is a worldwide leader in the design, development, manufacture and support of high-performance process control metrology systems used by semiconductor device manufacturers. The Company provides a full-fab solution through its families of proprietary systems for metrology applications used throughout the device manufacturing process. Rudolph's product development has successfully anticipated and addressed many emerging trends that are driving the semiconductor industry's growth. The Company's success in creating complementary metrology applications through aggressive research and development is key to Rudolph's strategy for continued technological and market leadership. For more information on Rudolph, please visit the Company's website at rudolphtech.com.
About TEL
TEL, established in 1963, is a leading supplier of innovative semiconductor and FPD production equipment worldwide. Product lines include coater/developers, thermal processing system, dry etchers, CVD systems, sputtering systems (PVD), wet cleaning systems, and test systems. In Japan, TEL distributes other leading edge semiconductor equipment tools, such as metrology tools or process control systems. In addition, TEL distributes high quality computer systems, semiconductor devices and electronic components of other leading suppliers, as well as computer network related products from around the world. To support this diverse product base, TEL has strategically located research & development, manufacturing, sales, and service locations all over the world. TEL is a publicly held company listed on the Tokyo Stock Exchange. tel.co.jp
Safe Harbor Statement
This press release contains forward-looking statements, including statements related to our revenue expectations and our anticipated leadership position in the industry. Actual results may differ materially from those projected due to a number of risks, including the impact of the slowdown in the overall economy and the uncertainty of the current global political environment following the recent terrorist attacks, changes in customer demands for our existing and new products, the timing, cancellation or delay of customer orders and shipments and the timing of revenue recognition of shipments, new product offerings from our competitors, changes in or an inability to execute Rudolph Technologies' business strategy, unanticipated manufacturing or supply problems and changes in tax rules. Rudolph Technologies cannot guarantee future results, levels of activity, performance or achievements. The matters discussed in this press release also involve risks and uncertainties summarized under the heading "Risk Factors" in Rudolph Technologies' Form 10K filed for the year ended December 31, 2001. These factors are updated from time to time through the filing of reports and registration statements with the Securities and Exchange Commission. Rudolph Technologies does not assume any obligation to update the forward-looking information contained in this press release.
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Source: Rudolph Technologies, Inc |
