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Technology Stocks : General Lithography

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To: Andrew Vance who wrote (492)7/25/1997 10:43:00 AM
From: unotooth   of 1305
 
Also, the "stiff" beam, proton, should not be completely discounted.
There has been work in Europe for a few years on ion projection
litho. An experimental tool is at the Fraunhofer Institute in
Berlin where much resist work has been done. Like SCALPEL it is
a reduction tool, but a full-field one. Protons also have several
processing advantages over electrons.......

-Uno
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