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Technology Stocks : Trikon Technologies - TRKN

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To: semicon who wrote (185)	8/3/1997 12:51:00 PM
From: davesd	of 926

Semi, Forcefill is in production at TI and Siemans and several other places. As I mentioned they are now working on CU....to fill vias...but the industry is not there yet...Al and Tungsten are the main metals today and probably for awhile. The MORI source systems are in production at Hundyai and at Dallas semi and a couple of other smaller sites....as a matter of fact if I'm not mistaken LSI did a marathon test on the Metal etcher and LSI is now customer of TRKN. As far as the Oxide tool....I'm not sure what you mean by "beta"...they are shipping the tool and it is being bought for developing new processes by Fabs....All TRKN ethchers are the same platform with the same MORI source, the poly etchers is basically the same etcher as the oxide...with a few tweeks to the the MORI source. I didn't understand what you said about the low K.....but TRKN has demonstrated 2.1 others are struggling at around 3.0 with flourine technology, which has been shown to be unstable (see article in Scientific American). The Flowfill tool is in production at several locations, the low k flowfill (announsed in Feb this year) is the same tool but with a few tweeks in the chemicals....carbon doping in the silicon oxide. So the tool has been running in production for awhile....the dielectric portion is now being tested. From what I have heard...a couple of customers who have the "regular" flowfill tool...retrofitted them to do low k flowfill. I don't know if the AMAT person that I met at the semicon show was a senior or not....but they sure asked alot of questions of the TRKN folks as to how they did this and that....they were having problems accomplishing things that TRKN can do. I agree that alot of TRKN systems are going into the R&D portion of the FABs and until they get put into mass production....they may still be considered "beta" by the FABs. So the key is going to be repeat orders from the sites that have betas. dave

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