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Technology Stocks : SOITEC, Silicon-On-Insulator TEChnologies
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To: kinkblot who wrote (27)6/19/2003 9:55:21 AM
From: kinkblot   of 83
 
Industrial Physicist (June/July 03) "Ion implantation in silicon technology"

by Leonard Rubin and John Poate of Axcelis

aip.org

Figure 2 is a dose-energy diagram showing various applications; at top center is "bonded wafer splitting for silicon on insulator."

The article contains some errors and omissions, but as stated, the technology was largely developed in the early to mid-60s at HVEC subsidiary Ion Physics Corporation. Much of that work was funded by government contracts.
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