Varian Semiconductor's New VIISta Ion Implanters Break Through the 300 Wafers Per Hour Barrier
Monday July 14, 9:07 am ET
Single Wafer VIISta Platform Enables the Highest Productivity Advantage
GLOUCESTER, Mass.--(BUSINESS WIRE)--July 14, 2003--Varian Semiconductor Equipment Associates, Inc. (NASDAQ: VSEA - News), a leading supplier of ion implantation systems, today introduced three new ion implanters in its single wafer VIISta platform. The new VIISta 80HP high current, VIISta 810EHP medium current, and VIISta 3000HP high energy tools break the old paradigms by being the first complete suite of ion implanters in the industry capable of greater than 300 wafers per hour.
"The new series of VIISta ion implanters provides customers with the best combination of broad application overlap with a significant increase in productivity," said John Aldeborgh, vice president of sales and marketing at Varian Semiconductor. "The higher throughput drives down the cost of ownership, while making the single wafer VIISta tools the fastest ion implanters in the fab. In fact, no other ion implanter available today exceeds the 300 wafer per hour limit. We believe the productivity and process advantages of the new VIISta platform make the VIISta tools the best choice for all ion implantation requirements."
The VIISta 80HP high current ion implanter's patented dual magnet, broad beam architecture provides a unique decel mode configuration and greater process control for advanced ultra shallow junction applications. The VIISta 810EHP ion implanter increases the capabilities of the VIISta 810, the industry benchmark for medium current applications. The VIISta 3000HP high energy ion implanter's high vacuum conductance endstation and beam filter provide higher effective productivity without compromising dose accuracy and energy purity.
All of the VIISta products feature the Varian Control System (VCS), the Varian Positioning System (VPS), and a common single wafer endstation. This high degree of commonality across the VIISta platform facilitates process matching throughout the tool set and provides flexibility in managing capacity, product mix changes, spare parts and training.
About Varian Semiconductor
Varian Semiconductor Equipment Associates, Inc. is a leading producer of ion implantation equipment used in the manufacture of semiconductors. The company is headquartered in Gloucester, Massachusetts, and operates worldwide. Varian Semiconductor maintains a web site at www.vsea.com. The information contained in the company's web site is not incorporated by reference into this release, and the web site address is included in this release as an inactive textual reference only.
Note: This release contains forward-looking statements for purposes of the safe harbor provisions under The Private Securities Litigation Reform Act of 1995. For this purpose, the statements concerning the company's performance, market share and technology leadership, technological capabilities and benefits are forward-looking statements and any statements using the terms "believes," "anticipates," "expects," "plans," or similar expressions are forward-looking statements. There are a number of important risks and factors that could cause actual events to differ materially from those suggested or indicated by such forward-looking statements. These include, among others, volatility in the semiconductor equipment industry; economic conditions in general and as they affect the company's customers; significant fluctuations in the company's quarterly operating results; the impact of rapid technological change; the company's dependence on the development and introduction of new products; the company's concentration on ion implantation systems and related products; concentration in the company's customer base and lengthy sales cycles; the highly competitive market in which the company competes; risks of international sales; foreign currency risks; and general economic conditions; and other factors identified in the company's Annual Report on Form 10-K, and the most recent Quarterly Reports on Form 10-Q filed with the Securities and Exchange Commission. The company cannot guarantee any future results, levels of activity, performance or achievement. The company undertakes no obligation to update any of the forward-looking statements after the date of this press release. |
