International SEMATECH Selects Mattson Technology's 3000 Plus RTP System for ATDF Production Line
Monday July 14, 8:31 am ET
FREMONT, Calif., July 14 /PRNewswire-FirstCall/ -- Mattson Technology, Inc. (Nasdaq: MTSN - News), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced it has received an order from International SEMATECH for its 3000 Plus RTP system. The system is scheduled to ship by the end of the third quarter of 2003 and will be used for baseline control processes and in the testing of the thermal stability of high-k material systems in SEMATECH's Advanced Tool Development Facility (ATDF) production line in Austin, TX.
"Advanced RTP processes are necessary for 90 nm ITRS node processing and beyond. Fast-ramp capability and temperature control will be critical to our successful demonstration of novel high-k, metal gate and non-classical CMOS unit processes to our member companies," said Larry Larson, associate director of International SEMATECH's Front-End Processes Division.
"International SEMATECH's selection of the 3000 Plus reflects the importance of RTP technology, particularly for ultra-shallow junction formation and advanced anneal applications," said Douglas K. Walker, director of North American operations of Mattson Technology. "We have worked with SEMATECH on ultra-shallow formation and gate stack programs over the past several years and are pleased to have the opportunity to extend our collaborative efforts in the development of additional RTP applications."
About the 3000 Plus
The 3000 Plus is Mattson Technology's latest 300 mm RTP tool designed for production of sub-90 nm generation devices. The 3000 Plus offers fast ramp capability and extension of the temperature measurement and control range down to lower temperatures, allowing it to address the most stringent processing requirements. The system's applications suite ranges from state-of-the-art cobalt silicide anneals to the most demanding flash anneal processes for ultra-shallow junction formation.
About International SEMATECH
International SEMATECH (ISMT) is a global semiconductor technology development consortium that has effectively represented the semiconductor manufacturing industry on innovation issues since 1988; its members are AMD, Hewlett-Packard, IBM, Infineon, Intel, Motorola, Philips, Texas Instruments and TSMC. ISMT conducts state-of-the-art research, and is a highly-regarded technology partner whose mission is to promote the interests common to all chipmakers. It has extensive experience collaborating with equipment and materials suppliers, as well as government and academic research centers, to refine the tools and technology necessary to produce future generations of chips. Additional information may be found at www.sematech.org.
About Mattson Technology, Inc.
Mattson Technology, Inc. is a leading supplier of semiconductor wafer processing equipment used in "front-end" fabrication of integrated circuits. The company is a market leader in dry strip and RTP equipment, and its products combine advanced process technology on high-productivity platforms backed by industry-leading support. Since beginning operations in 1989, the company's core vision has been to help bring technology leadership and productivity gains to semiconductor manufacturers worldwide. Headquartered in Fremont, Calif., the company maintains sales and support centers throughout the United States, Europe and Asia. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, Calif. 94538. Telephone: 800-MATTSON/510-657-5900. Fax: 510-492-5911. Internet: www.mattson.com.
Mattson Technology Contact
Lauren Vu
PR Manager
Mattson Technology, Inc.
tel 510-492-6518
fax 510-492-2800
lauren.vu@mattson.com
Source: Mattson Technology, Inc. |
