Leading IC Manufacturer to Use FSI International's MAGELLAN Immersion System in 65-nm Node Process Development
Thursday September 11, 12:27 pm ET
MINNEAPOLIS--(BUSINESS WIRE)--Sept. 11, 2003--FSI International, Inc. (Nasdaq:FSII - News) today announced that a leading IC manufacturer has selected the MAGELLAN® STG® Immersion Clean System for its 65-nm node process development line. The MAGELLAN System will be used in the development of front-end-of-line (FEOL) wafer cleaning processes.
During the preliminary selection process, the MAGELLAN System demonstrated state-of-the-art etch and particle performance at the 65-nm node. The tool's extensive portfolio of exclusive intellectual property, including FSI's critical surface tension gradient (STG) rinse/dry technology, SymFlow(TM) etch technology, ozone oxide re-growth and narrow-gate-compatible megasonics, indicates that the MAGELLAN System is ready for the challenges posed by advanced technologies.
"This selection marks the MAGELLAN System as among the best auto wet systems available, distinguished from the competition through its unique performance capabilities that translate into superior process and productivity advantages for our customers," said Don Mitchell, FSI International chairman and CEO. "The MAGELLAN System further demonstrates FSI's commitment to providing value-added, extendable surface conditioning solutions, and it is well-positioned to capture share in the auto wet systems segment, the largest of the wafer cleaning market."
Customers are able to develop all FEOL wafer cleaning processes, including pre-high-k gate cleans, pre-furnace cleans, high-k etching, nitride etching, oxide etching, and photoresist strip on one five-module MAGELLAN System. This represents a considerable saving in capital costs and footprint as compared to competing products that require two or more systems to perform the same applications. In production environments, customers can configure the MAGELLAN System to specific manufacturing needs, further optimizing capital spending and footprint. Example configurations include two module systems for critical clean and five-module systems for photoresist strip.
The MAGELLAN System is very user-friendly and versatile allowing changes from one application to another by means of software control and has the ability to process different wafers from the same lot under various controlled process conditions - a tremendous benefit for R&D and production fabs that run small lots.
FSI International, Inc. is a global supplier of surface conditioning equipment technology and support services for microelectronics manufacturing. Using the Company's broad portfolio of cleaning products, which include batch and single-wafer platforms for immersion, spray, vapor and CryoKinetic technologies, customers are able to achieve their process performance, flexibility and productivity goals.
The Company's support services programs provide product and process enhancements to extend the life of installed FSI equipment enabling worldwide customers to realize a higher return on their capital investment.
FSI maintains a Web site at fsi-intl.com.
Contact:
FSI International, Inc., Minneapolis
Trade Media:
Laurie Walker, 952-448-8066
or
Financial Media and Investors:
Benno Sand, 952-448-8936
Source: FSI International, Inc. |
