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Technology Stocks : General Lithography

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To: Andrew Vance who wrote (531)	8/12/1997 10:30:00 PM
From: FJB	of 1305

Andrew, Dave, Yousef, or other expert, Can you help me out in judging what stated(by the company) throughput means vs. actual throughput for lithography systems? There is quite a range of stated throughputs for the latest step and scan systems. What are the main factors by which photolithography systems are judged and in what order would you rank these factors? As a layperson, it would seem throughput would be the most important factor, but that's why I am asking you. :-) The throughput numbers I have for step and scan systems is as follows: Maker Model WPH Nikon NSR-S201A 50 SVGL Micrascan III 60 Cannon FPA-4000ES1 80 ASMLF PAS 5500/500 96 Here is where I got the numbers: lfw.com svg.com The Cannon number is from a press release for which I recall them stating 80 WPH, so please feel free to double check this number. asml.com Should I believe the numbers or not? TIA for your time. Bob

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