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Technology Stocks : Energy Conversion Devices
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To: alfranco who wrote (7674)5/10/2004 12:40:13 PM
From: Krowbar  Read Replies (1) of 8393
 
Al, There is a figure 1 table about 3/4 of the way down the patent. I'll try to reproduce it here. Sample 5-147 is the control, and the rest are modified. (note that SI's editor will not allow me to space the numbers, but the 70 numbers belong under the min.)

TABLE 1
Formation Step
Reactant H.sub.2 Treatment Total
Volume Ratio Step Time Thickness
Sample SiH.sub.4 :H.sub.2 Time (s) Time (s) (min) (nm)
5-147 Pure SiH.sub.4 -- 0 8 44.65
5-146 1:10 1 4 70 47.8
5-148 1:10 1 2 70 83.2
5-149 1:10 2 2 33 60.2

This describes treatment with hydrogen, but fluorine is also mentioned as an alternative. Also this treatment does not result in a completed layer.

I also have trouble getting images from the USPTO site. sometimes I get them, and sometimes it locks my computer up.

Del
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