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To: advinfo who wrote (3015)	8/28/1997 6:09:00 PM
From: timwa	of 9695

Found this news: NTT joins chip makers in research on X-ray circuit printing SOURCE: Nikkei English News DATE: Wednesday, August 27, 1997 A consortium of chip makers will team up with Nippon Telegraph and Telephone Corp. (9432) to research the use of X-rays in semiconductor fabrication, The Nihon Keizai Shimbun learned Tuesday. Under a one-year agreement, NTT and the consortium will study methods for printing chip circuits using NTT's synchrotron radiation equipment and an X-ray exposure system developed by the chip firms. NTT has been a leader in X-ray lithography since 1984, and has developed X-ray technology for printing 0.07-micron circuits. NEC Corp. (6701), Toshiba Corp. (6502), Fujitsu Ltd. (6702), Mitsubishi Electric Corp. (6503), Hitachi Ltd. (6501) and NTT Advanced Technology Corp. will participate in the project. The next step will be developing a high-precision mask for circuit printing. The agreement will likely be extended through fiscal 2000, said sources at the Association of Super-advanced Electronics Technologies, set up last year to develop advanced semiconductors. The consortium hopes the joint research will spur development of 4-gigabit DRAMs and other semiconductors.

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