Varian Semiconductor Equipment Associates -- VSEA Message Board

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Technology Stocks : Varian Semiconductor Equipment Associates -- VSEA

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To: robert b furman who wrote (1698)	2/10/2005 8:16:37 AM
From: Proud_Infidel	Read Replies (1) of 1929

Heard on the Beat: Axcelis' implanter due Feb. 16 Silicon Strategies 02/09/2005, 8:05 PM ET On Feb. 16, Axcelis Technologies Inc. plans to roll out its first single-wafer ion implanter, which is believed to be a high-current machine. "Axcelis Technologies will introduce its new single wafer ion implanter family to address the complete application needs of the 65-nm technology node and beyond," according to e-mail invite from the chip-equipment maker. The tool has been expected for nearly a year (see May 24, 2004 story). At present, Axcelis sells batch-wafer, high-current implanters. But Axcelis and Applied Materials Inc. have or are fielding single-wafer tools. For years, Varian has offered single-wafer, high-current machines. Most believe that single-wafer solutions will be required for the 65-nm node.

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