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To: LLCF who wrote (931)	9/8/1997 12:29:00 AM
From: FJB	of 2946

From these links it appears Cymer makes a line of lasers especially for catadioptric lenses, MicrascanIII. The greatest difference between the two products is something called spectral bandwith. Would anyone care to explain what that means? Does it affect which photoresist chemistry is used in a favorable way? Since everyone is moving to step and scan, I am assuming the greater spectral bandwith has some sort of benefit. cymer.com cymer.com TIA, Bob

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