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Technology Stocks : General Lithography
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To: Artslaw who wrote (556)9/9/1997 4:26:00 PM
From: Andrew Vance   of 1305
 
You do need to look at spinners and developers if your present systems are not tightly controlled in regards to its environment. DUV will require tight er environmental controls across the board, IMO. These controls are temperature, humidity, and new forms of contamination. Their are airborne contaminates that naturally occur in nature and in ULPA filtration media that can affect the performance of DUV resists. As far as I am concerned, the processing equipment for DUV application and develop need to be either upgraded, replaced or improved on.

Andrew

PS-Not to plug FSII but I think their Polaris system can provide a quality environment for the DUV processing mentioned above. DNS is also a good company.
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