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Technology Stocks : General Lithography
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To: Yousef who wrote (563)9/10/1997 12:31:00 AM
From: Andrew Vance   of 1305
 
Thanks for the technical explanation of what I alluded to. Nice to have a fellow techie around. Also, thanks for bringing the Anti-reflective coating issue to light. I admit that it slipped my mind. Furthermore, I am surprised that the cost of the resist has actually fallen to only 3X that of i-line. It used to be a higher delta.

Anyway, an excellent response that clearly shows why the emphasis is being placed to extend the useful life of i-line resist processing. Just a funny number to think about:

16 photo layers with no layers needing to be reworked.
On an 8" wafer (200mm) let's say 6 cc of resist is dispensed. Therefore, given 5% waste in a bottle, a one liter bottle of resist will coat 160 wafers or the equivalent of 10 fully processed wafers. At a cost of $2000 per 4 liters (gallon), you would have a cost of $2000 per 40 wafers processed or $50 per wafer versus a cost of roughly $17 per wafer for i-line. If you consider a normal manufacturing site having at least 3000 outs per week, you get a delta of $33,000 per week or $1.7 million in profit on just the cost of this one chemical. The depreciation of a DUV stepper is roughly 2X more than an i-line stepper per wafer processed. Add the BARC and other costs related to DUV and the $$$$ adds up. There is significant added costs to going DUV which impacts the bottom line.

Sorry for the verbose response but I felt a brief financial set of implications would complement the great technical response you gave.

Andrew
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