Brooks Automation to Provide STS with Vacuum Automation Systems for New Tools
Monday September 12, 9:16 am ET
CHELMSFORD, Mass., Sept. 12 /PRNewswire-FirstCall/ -- Brooks Automation, Inc (Nasdaq: BRKS - News), which develops and produces hardware, software and systems to enable manufacturing efficiencies for the semiconductor and other complex manufacturing industries, and Surface Technology Systems PLC (STS) (LSE: SRTS - News), a leading provider of specialized plasma etch and deposition systems, today announced that STS will be introducing new etch systems utilizing Brooks' Marathon Express(TM) family of vacuum cluster tool automation platforms. STS offers a range of products for semiconductor device manufacturing process applications such as advanced silicon etch, advanced oxide etch, inductively coupled plasma etch, reactive ion etch, chemical vapor etch, and plasma enhanced chemical vapor deposition.
"The Brooks vacuum automation platform is an important enabler for STS, allowing us to focus our R&D investments more efficiently on our core process technologies," commented Leslie Lea, Deputy Chief Executive Officer and Chief Technical Officer at STS. "By utilizing the Marathon Express from Brooks as the backbone for our tool design, we immediately have a proven, world-class platform upon which to quickly bring to market our leading etch and deposition technologies for key emerging industries such as MEMS, compound semiconductors, photonics, wafer-level packaging and data storage."
Michael Pippins, senior vice-president and chief marketing officer at Brooks Automation, said, "We are pleased that STS has selected Brooks as the automation partner to help bring to market unique solutions for their served industries. Our highly configurable Marathon Express vacuum automation systems are best-in-class platforms for a wide range of vacuum-based applications including etch, deposition and metrology. As our OEM customers continue to outsource their automation systems, looking to companies like Brooks to provide them with completely integrated handling platforms, we think this trend creates a compelling growth opportunity for Brooks."
About Brooks Automation, Inc.
Brooks is a leading worldwide provider of automation solutions to the global semiconductor and related industries. The company's factory and tool automation hardware, software and professional services can manage every wafer, reticle and data movement in the fab, helping customers improve throughput and yield while reducing both cost and time to market. Brooks products and services are used in virtually every fab in the world as well as by many customers in industries outside of semiconductor manufacturing. For more information, visit brooks.com.
About Surface Technology Systems
Surface Technology Systems designs and manufactures a range of highly specialized systems incorporating innovative technology used in the production of semiconductors and related devices and is a leader in plasma based etch and deposition technologies for processing non 'mainstream' semiconductor devices. STS serves a range of applications in several emerging sectors within the telecommunications, data storage, advanced packaging, MEMS and Nanotechnology.
STS is the market leader in deep silicon etching for the growing MEMS market, offering patent-protected technology. In addition, STS has a strong presence in each of its other served markets and distributes its process solutions worldwide through an experienced sales and service operation. The Group currently markets in over 30 countries and has an installed base of over 850 systems. For more information about STS please see stsystems.com.
Safe Harbor Statement under Section 21E of the Securities Exchange Act of 1934. Some statements in this press release are forward-looking statements made under Section 21E of the Securities Exchange Act of 1934. These statements are neither promises nor guarantees but involve risks and uncertainties, both known and unknown, that could cause Brooks to experience results that differ materially from our expectations. These statements are based on current management expectations and analysis. As a result we can provide no assurance that our future results will not be materially different from those projected. The Company undertakes no obligation to revise or update any forward-looking statements, or to make any other forward-looking statements, whether as a result of new information, future events or otherwise.
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Source: Brooks Automation, Inc |
