I'm so happy to be able to add something. Lambda Physik does have an EUV eximer in the works, and they say it uses non-corrosive gases (read cheaper maintenance, there is a whole system dedicated to flourine containment on the KrF). They have some really really smart people working for them, and probably the only outfit in the world with the class of Cymer when it comes to laser geeks. Yes, they could be a player in the next generation (and I'll bet you a dollar that EUV is one of the technologies nominated by HRH Sematech for the next generation of chip etchers).
Also, while I grant you your point about Canon, Nikon, and Komatsu, Japan is another world altogether. Remember, they have some of the most valuable real estate in the world under rice cultivation, just to keep the country's food supply independent. Which is to say that I can believe the Japanese govt/industry could easily convince Canon and/or Nikon to equip a certain number steppers with Komatsu lasers. This would cost them about 20% in terms of productivity per dollar, and would therefore be cost-prohibitive in the world market, but the same people can easily convince Japanese fabs to buy the damn steppers and then put the money up to support the resulting higher chip prices. I mean, the Komatsu DUV pulse lasers work fine, it's just an efficiency problem.
Coherent is a terrific laser company but an also ran for stepper lamps. |
