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Technology Stocks : Applied Materials No-Politics Thread (AMAT)
AMAT 256.40+1.2%3:59 PM EST
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To: robert b furman who wrote (16612)11/21/2005 11:08:38 AM
From: etchmeister  Read Replies (2) of 25522
 
Hi Bob
The "trick" with etch is to obtain a volatile product;
appears the H2 is doing the trick to decompose the resist (which mainly consists of C and H2).

Launched in May 2003, Axcelis' RadiantStrip 320Lk is the result of nearly five years of focused research and collaboration with customers and suppliers of low-k materials. The system uses Axcelis' patented zero-damage He:H2 process to remove photoresist and residues from wafers during the chipmaking process. The first orders began shipping to customers in November.
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