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Technology Stocks : General Lithography

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To: LLCF who wrote (623)	9/18/1997 1:18:00 AM
From: Andrew Vance	of 1305

ISI is incapable of mass producing their systems to the volumes required for full production implementation at this time. Therefore, their systems are great for R&D labs and for those production Fabs that would not consume ISI's internal manufacturing capability. The industry is moving towards step and scan. I am having a hard time adjusting to that phrase, though. A scanner usually meant a projection aligner where the wafer and the mask moved on opposited sides of a carriage drive with a slit of light shining onto the wafer as both the wafer and mask simultaneously moved across the slit. Steppers have a fixed reticle(mask) that has a beam of light shining through it while the wafer stage is "stepped" (moved) under the fixed reticle/light source. The step and scan is a combination of the two. The area to be exposed is bigger than the lens/exposure field. Therefore, the wafer is stepped under the reticle like a stepper, then additional scanning takes place. I betcha I confused you. Look at the time stamp on this as my excuse. Real late and it made sense to me. That doesn't mean the answer makes sense to anyone else(GGGG). Andrew

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