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To: dr_elis who wrote (1086)2/18/2006 3:13:53 PM
From: niek  Read Replies (1) of 43256
 
re:Re: "The tool is said to have a 1.20 NA projection lens, although sources believe that the initial machines will be specified at 1.05 NA."

re:
Is this true?

First of all, the article is written by LaPedus. Nobody knows his sources. Do they exist?

Now about the Twinscan XT:1700i and XT:1700Fi.

The 1700i is a 1.05 NA litho machine for production of 65- and 55-nm, and the 1700Fi is the 1.20 NA litho for the 45-nm node.
All depends if Carl Zeiss will deliver the 1.20 NA optical system in time.
My opinion is that the 1700Fi will be ready in time.
Niek
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