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Technology Stocks : General Lithography

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To: LLCF who wrote (626)	9/18/1997 10:19:00 PM
From: James Word	of 1305

David and Everyone RE: Cymer Lasers "3.) SVGI is the ONLY one currently shipping step and scan (micrascan). 4.) The others have at least till april (Cymer supposedly ships their next generation laser then) before they can start." I'm not so sure about your comment number 3. You may be right, but if Nikon, Canon, and ASML aren't shipping scanners they are at least taking orders and giving delivery dates. Comment number 4 is confusing to me, as is the whole "Scanners need next-gen Cymer laser, which isn't ready, therefore nobody is shipping scanners (save SVGI)" thread. Maybe I'm a bit confused, but aren't all vendors shipping Excimer DUV steppers? Aren't these steppers using refractive optics? Don't those systems require the narrow-bandwidth Cymer lasers, just like the step-and-repeat systems (pretty sure the answer is yes). I know for a fact that Canon's EX (for EXcimer)series of steppers has been around for years and that they are now shipping the 4th generation of that model (using a Cymer source). Either these systems don't require the advanced Cymer laser (I'd be surprised) or this laser is actually on the market. Or maybe other laser companies have been supplying excimer lasers? James Word

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